Absolute accuracy : Deviation between the actual position and the desired one. If a stage has to move 100µm but it moves only 99.99µm (measured through an ideal scale), then the inaccuracy is 10nm. The permanent positioning error along an axis is designated as accuracy. Absolute accuracy is aff¬ected by calibration errors, linearity errors, hysteresis, Abbe errors and positioning noise.
絕對精度:實際位置與(yu) 所需位置之間的偏差。 如果一個(ge) 平台必須移動 100µm,但它僅(jin) 移動 99.99µm(通過理想標尺測量),則誤差為(wei) 10nm。 沿軸的永久定位誤差稱為(wei) 精度。 絕對精度受校準誤差、線性誤差、滯後、阿貝誤差和定位噪聲的影響。
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壓電位移台常用術語中英文對照表
Absolute accuracy : Deviation between the actual position and the desired one. If a stage has to move 100µm but it moves only 99.99µm (measured through an ideal scale), then the inaccuracy is 10nm. The permanent positioning error along an axis is designated as accuracy. Absolute accuracy is aff¬ected by calibration errors, linearity errors, hysteresis, Abbe errors and positioning noise.
絕對精度:實際位置與(yu) 所需位置之間的偏差。 如果一個(ge) 平台必須移動 100µm,但它僅(jin) 移動 99.99µm(通過理想標尺測量),則誤差為(wei) 10nm。 沿軸的永久定位誤差稱為(wei) 精度。 絕對精度受校準誤差、線性誤差、滯後、阿貝誤差和定位噪聲的影響。
Backlash : Backlash is a positioning error occurring upon change of direction. Backlash can be caused by insufficiently preloaded thrust or inaccurate meshing of drive components, for example gear teeth. Piezoconcept’s flexure motion translation mechanism and piezo actuator designs are inherently backlash free.
齒隙:齒隙是在運動方向改變時發生的定位誤差。 齒隙可能是由於(yu) 預載推力不足或驅動部件(例如齒輪齒)齧合不準確造成的。 Piezoconcept 的彎曲運動平移機構和壓電致動器設計本質上是無間隙的。
Bandwidth : The frequency range to which the amplitude of the stage's motion is dropped by 3dB. It reflects how fast the stage can follow the driving signal.
帶寬:載物台運動幅度下降的頻率範圍為(wei) 3dB。 它反映了平台能夠以多快的速度跟隨驅動信號。
Drift : A position change over time, which includes the e¬ffects of temperature change and other environmental e¬ffects. The drift may be introduced from both the mechanical system and electronics.
漂移:位置隨時間的變化,包括溫度變化和其他環境影響的影響。 漂移可能來自機械係統和電子設備。
Friction : Friction is defined as resistance between contacting surfaces during movement. Friction may be constant or speed dependent. Because they use flexure, the nanopositioners from Piezoconcept are friction free.
摩擦力:摩擦力定義(yi) 為(wei) 運動過程中接觸表麵之間的阻力。 摩擦力可以是恒定的或取決(jue) 於(yu) 速度的。 因為(wei) 使用柔性連接,Piezoconcept 的納米定位器是無摩擦的。
Hysteresis : The positioning error between forward scan and backward scan. A closed-loop control is an ideal solution for this problem and is done by using a network of High Resolution silicon sensor to provide feedback signals.
滯後:前向掃描和後向掃描之間的定位誤差。 閉環控製是該問題的理想解決(jue) 方案,它通過使用高分辨率矽傳(chuan) 感器網絡提供反饋信號來完成。
Linearity error : The error between the actual position and the first-order best fit line (straight line). Our nanopositioning products are calibrated with laser interferometry and the non linearity errors are compensated down to 0.02% of the full travel.
線性誤差:實際位置與(yu) 一階最佳擬合線(直線)之間的誤差。 我們(men) 的納米定位国产欧美在线使用激光幹涉儀(yi) 進行校準,非線性誤差補償(chang) 低至全行程的 0.02%。
Orthogonality error : The angular off¬set of two defined motion axes from being orthogonal to each other. It can be interpreted as a part of crosstalk.
正交性誤差:兩(liang) 個(ge) 定義(yi) 的運動軸相互正交的角度偏移。 它可以解釋為(wei) 串擾的一部分。
Position noise : The amplitude of the stage shaking when it is on a static command. It is usually measured and specified with Peak-To-Peak value. It is a combination of the sensor noise, driver electronics noise and command noise, etc. The position noise of our stages is very limited due to the very high Signal-To-Noise ratio of the Silicon HR sensors we use.
位置噪聲:在靜態命令下載物台晃動的幅度。 它通常用峰峰值來測量和指定。 它是傳(chuan) 感器噪聲、驅動器電子噪聲和命令噪聲等的組合。由於(yu) 我們(men) 使用的 Silicon HR 傳(chuan) 感器具有非常高的信噪比,我們(men) 平台的位置噪聲非常有限。
Range of motion : The maximum dISPlacement of the nanopositioners.
運動範圍(行程):納米定位器的最大位移。
Resolution : The minimum step size the stage can move.
分辨率:舞台可以移動的最小步長。
Resonant frequency : Piezostage are oscillating mechanical systems characterized by a resonant frequency. The resonant frequency that we give is the lowest resonant frequency that can be seen on a nanopositioner. In general, the higher the resonant frequency of a system, the higher the stability and the wider working bandwidth the system will have. The resonant frequency of a piezostage is determined by the square root of the ratio of sti¬ness and mass.
諧振頻率:壓電級是以諧振頻率為(wei) 特征的振蕩機械係統。 我們(men) 給出的共振頻率是在納米定位器上可以看到的最低共振頻率。 一般來說,係統的諧振頻率越高,係統的穩定性和工作帶寬就越寬。 壓電級的共振頻率由剛度和質量之比的平方根決(jue) 定。
Silicon HR sensor : Piezoconcept use temperature compensated High-Resolution silicon sensors network for reaching highest long-term stability. This measuring device is capable of measuring position noise in the picometer range and its response is not dependent of the presence of pollutants, air pressure changes like other high-end sensors can be.
Si-HR 傳(chuan) 感器:Piezoconcept 使用溫度補償(chang) 高分辨率矽傳(chuan) 感器網絡,以達到最高的長期穩定性。 該測量裝置能夠測量皮米範圍內(nei) 的位置噪聲,並且其響應不依賴於(yu) 汙染物的存在,應對改變氣壓帶來的影響與(yu) 其他高端傳(chuan) 感器一樣。
Step response time : The step response time is the time needed by the nanopositioner to do the travel from 10% of the commanded value to 90% of the commanded value. The step response time reflects the dynamic characteristics of the system and is relatively to the installation method and load of the stage.
階躍響應時間:階躍響應時間是納米定位器從(cong) 指令值的 10% 到指令值的 90% 所需的時間。 階躍響應時間反映了係統的動態特性,並且與(yu) 位移台的安裝方式和負載有關(guan) 。
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