橢偏儀在位表征電化學沉積的係統搭建（二十六）- 沉積體係建模擬合

正文

橢偏儀(yi) 在位表征電化學沉積的係統搭建（二十六）- 沉積體(ti) 係建模擬合

1、多層膜模型

通過之前的建模與(yu) 擬合的詳細描述，這裏建立三層層狀模型，如圖4-9所示，其中圖4-9(a)為(wei) 沉積的係統的橫截麵示意圖，圖4-9(b)等效的光學模型圖，第1層為(wei) 沉積之前裝置測試擬合結果等效層(Equivalent layer)，第二層為(wei) 沉積薄膜層(CU₂Ofilm)，第三層為(wei) Au/Si基底層(Au/Si substrate)。

圖4-9沉積係統截麵(a)及其擬合模型(b)示意圖

2、擬合步驟

首先把沉積之前裝置測試得到的數據先用逐點擬合模型進行擬合得到光學常數n、k及厚度d，然後建立三層模型並分段擬合。300nm-500nm用Lorentz Oscillator+Drude模型擬合，得到n、k、d、、；然後在此基礎上500nm-800nm波段用逐點擬合得到該段的n、k、、。

3、沉積薄膜層的光學常數

通過層狀模型分段擬合，得到不同沉積時間的在300nm–800nm波段的各個(ge) 擬合參數如表4-2所示。其中RMSE代表擬合的均方根誤差，可以看到不同時間擬合得到的RMSE都比較小，在0.36-0.50之間，說明該擬合結果較為(wei) 可靠。表4-2中d(CU₂O,nm)代表擬合得到的沉積層的厚度，d(ITO-Sol.nm)代表等效層的擬合厚度；、Γ對應Drude中的等離子體(ti) 頻率及阻尼頻率；A、E_ct、Γ(1、2、3、4）分別對應LorentzOscillator的振幅、中心能量和展寬能量。

4、光學常數的演變

圖4-10是經過擬合得到的n和k，從(cong) 圖中可以看到不同沉積時間下得到的曲線隨波長的變化大致趨勢一致，但在細節方麵及數值上會(hui) 有變化。

從(cong) 圖4-10(a)折射率n值來看，沒有沉積之前即0s時，n值從(cong) 300nm-800nm不斷減小，在300nm-500nm波段平緩，500nm處驟減，600nm-800nm達到zui小值且有波動。與(yu) 0s相比，不同沉積時間在300nm-500nm波段每個(ge) 沉積時間的變化趨勢一致，數值上180szui大，360szui小，其餘(yu) 介於(yu) 二者之間；都在330nm和410nm附近存在波包。在500nm-800nm波段，變化趨勢比較相似，數值上比0s的大，但是存在波動，特別是180s在600nm附近存在驟減。

從(cong) 圖4-10(b)消光係數k值來看，0s時k值從(cong) 300nm-800nm不斷增加，在300nm-500nm波段平緩，500nm處驟增，600nm-800nm達到峰值且有波動。在500-800nm波段歸結於(yu) Au基底的等離子體(ti) 共振吸收。和0s相比，不同沉積時間300nm-500nm波段整體(ti) 數值上較小，且變化趨勢不一致，在500nm-800nm波段減小且趨於(yu) 平穩。

綜合n、k值的表現知在短波段(300nm-500nm)比在長波段(500nm-800nm)更能反應出沉積層的CU₂O的信息，故而後麵的研究分析著重在該波段。

圖4-10擬合得到的不同沉積時間薄膜的光學常數(a)、n；(b)、k

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參考文獻

[1] WONG H S P, FRANK D J, SOLOMON P M et al. Nanoscale cmos[J]. Proceedings of the IEEE, 1999, 87(4): 537-570.

[2] LOSURDO M, HINGERL K. ellipsometry at the nanoscale[M]. Springer Heidelberg New York Dordrecht London. 2013.

[3] DYRE J C. Universal low-temperature ac conductivity of macroscopically disordered nonmetals[J]. Physical Review B, 1993, 48(17): 12511-12526. DOI:10.1103/PhysRevB.48.12511.

[4] CHEN S, KÜHNE P, STANISHEV V et al. On the anomalous optical conductivity dISPersion of electrically conducting polymers: Ultra-wide spectral range ellipsometry combined with a Drude-Lorentz model[J]. Journal of Materials Chemistry C, 2019, 7(15): 4350-4362.

[5] 陳籃，周岩. 膜厚度測量的橢偏儀(yi) 法原理分析[J]. 大學物理實驗, 1999, 12(3): 10-13.

[6] ZAPIEN J A, COLLINS R W, MESSIER R. Multichannel ellipsometer for real time spectroscopy of thin film deposition from 1.5 to 6.5 eV[J]. Review of Scientific Instruments, 2000, 71(9): 3451-3460.

[7] DULTSEV F N, KOLOSOVSKY E A. Application of ellipsometry to control the plasmachemical synthesis of thin TiONx layers[J]. Advances in Condensed Matter Physics, 2015, 2015: 1-8.

[8] DULTSEV F N, KOLOSOVSKY E A. Application of ellipsometry to control the plasmachemical synthesis of thin TiONx layers[J]. Advances in Condensed Matter Physics, 2015, 2015: 1-8.

[9] YUAN M, YUAN L, HU Z et al. In Situ Spectroscopic Ellipsometry for Thermochromic CsPbI3 Phase Evolution Portfolio[J]. Journal of Physical Chemistry C, 2020, 124(14): 8008-8014.

[10] 焦楊景.橢偏儀(yi) 在位表征電化學沉積的係統搭建.雲(yun) 南大學說是論文,2022.

[11] CANEPA M, MAIDECCHI G, TOCCAFONDI C et al. Spectroscopic ellipsometry of self assembLED monolayers: Interface effects. the case of phenyl selenide SAMs on gold[J]. Physical Chemistry Chemical Physics, 2013, 15(27): 11559-11565. DOI:10.1039/c3cp51304a.

[12] FUJIWARA H, KONDO M, MATSUDA A. Interface-layer formation in microcrystalline Si:H growth on ZnO substrates studied by real-time spectroscopic ellipsometry and infrared spectroscopy[J]. Journal of Applied Physics, 2003, 93(5): 2400-2409.

[13] FUJIWARA H, TOYOSHIMA Y, KONDO M et al. Interface-layer formation mechanism in (formula presented) thin-film growth studied by real-time spectroscopic ellipsometry and infrared spectroscopy[J]. Physical Review B - Condensed Matter and Materials Physics, 1999, 60(19): 13598-13604.

[14] LEE W K, KO J S. Kinetic model for the simulation of hen egg white lysozyme adsorption at solid/water interface[J]. Korean Journal of Chemical Engineering, 2003, 20(3): 549-553.

[15] STAMATAKI K, PAPADAKIS V, EVEREST M A et al. Monitoring adsorption and sedimentation using evanescent-wave cavity ringdown ellipsometry[J]. Applied Optics, 2013, 52(5): 1086-1093.

[16] VIEGAS D, FERNANDES E, QUEIRÓS R et al. Adapting Bobbert-Vlieger model to spectroscopic ellipsometry of gold nanoparticles with bio-organic shells[J]. Biomedical Optics Express, 2017, 8(8): 3538.

[17] ARWIN H. Application of ellipsometry techniques to biological materials[J]. Thin Solid Films, 2011, 519(9): 2589-2592.

[18] ZIMMER A, VEYS-RENAUX D, BROCH L et al. In situ spectroelectrochemical ellipsometry using super continuum white laser: Study of the anodization of magnesium alloy [J]. Journal of Vacuum Science & Technology B, 2019, 37(6): 062911.

[19] ZANGOOIE S, BJORKLUND R, ARWIN H. Water Interaction with Thermally Oxidized Porous Silicon Layers[J]. Journal of The Electrochemical Society, 1997, 144(11): 4027-4035.

[20] KYUNG Y B, LEE S, OH H et al. Determination of the optical functions of various liquids by rotating compensator multichannel spectroscopic ellipsometry[J]. Bulletin of the Korean Chemical Society, 2005, 26(6): 947-951.

[21] OGIEGLO W, VAN DER WERF H, TEMPELMAN K et al. Erratum to ― n-Hexane induced swelling of thin PDMS films under non-equilibrium nanofiltration permeation conditions, resolved by spectroscopic ellipsometry‖ [J. Membr. Sci. 431 (2013), 233-243][J]. Journal of Membrane Science, 2013, 437: 312..

[22] BROCH L, JOHANN L, STEIN N et al. Real time in situ ellipsometric and gravimetric monitoring for electrochemistry experiments[J]. Review of Scientific Instruments, 2007, 78(6).

[23] BISIO F, PRATO M, BARBORINI E et al. Interaction of alkanethiols with nanoporous cluster-assembled Au films[J]. Langmuir, 2011, 27(13): 8371-8376.

[24] 李廣立. 氧化亞(ya) 銅薄膜的製備及其光電性能研究[D]. 西南交通大學, 2016.

[25] 董金礦. 氧化亞(ya) 銅薄膜的製備及其光催化性能的研究[D]. 安徽建築大學, 2014.

[26] 張楨. 氧化亞(ya) 銅薄膜的電化學製備及其光催化和光電性能的研究[D]. 上海交通大學材料科 學與(yu) 工程學院, 2013.

[27] DISSERTATION M. Cellulose Derivative and Lanthanide Complex Thin Film Cellulose Derivative and Lanthanide Complex Thin Film[J]. 2017.

[28] NIE J, YU X, HU D et al. Preparation and Properties of Cu2O/TiO2 heterojunction Nanocomposite for Rhodamine B Degradation under visible light[J]. ChemistrySelect, 2020, 5(27): 8118-8128.

[29] STRASSER P, GLIECH M, KUEHL S et al. Electrochemical processes on solid shaped nanoparticles with defined facets[J]. Chemical Society Reviews, 2018, 47(3): 715-735.

[30] XU Z, CHEN Y, ZHANG Z et al. Progress of research on underpotential deposition——I. Theory of underpotential deposition[J]. Wuli Huaxue Xuebao/ Acta Physico - Chimica Sinica, 2015, 31(7): 1219-1230.

[31] PANGAROV n. Thermodynamics of electrochemical phase formation and underpotential metal deposition[J]. Electrochimica Acta, 1983, 28(6): 763-775.

[32] KAYASTH S. ELECTRODEPOSITION STUDIES OF RARE EARTHS[J]. Methods in Geochemistry and Geophysics, 1972, 6(C): 5-13.

[33] KONDO T, TAKAKUSAGI S, UOSAKI K. Stability of underpotentially deposited Ag layers on a Au(1 1 1) surface studied by surface X-ray scattering[J]. Electrochemistry Communications, 2009, 11(4): 804-807.

[34] GASPAROTTO L H S, BORISENKO N, BOCCHI N et al. In situ STM investigation of the lithium underpotential deposition on Au(111) in the air- and water-stable ionic liquid 1-butyl-1-methylpyrrolidinium bis(trifluoromethylsulfonyl)amide[J]. Physical Chemistry Chemical Physics, 2009, 11(47): 11140-11145.

[35] SARABIA F J, CLIMENT V, FELIU J M. Underpotential deposition of Nickel on platinum single crystal electrodes[J]. Journal of Electroanalytical Chemistry, 2018, 819(V): 391-400.

[36] BARD A J, FAULKNER L R, SWAIN E et al. Fundamentals and Applications[M]. John Wiley & Sons, Inc, 2001.

[37] SCHWEINER F, MAIN J, FELDMAIER M et al. Impact of the valence band structure of Cu2O on excitonic spectra[J]. Physical Review B, 2016, 93(19): 1-16.

 [38] XIONG L, HUANG S, YANG X et al. P-Type and n-type Cu2O semiconductor thin films: Controllable preparation by simple solvothermal method and photoelectrochemical properties[J]. Electrochimica Acta, 2011, 56(6): 2735-2739.

[39] KAZIMIERCZUK T, FRÖHLICH D, SCHEEL S et al. Giant Rydberg excitons in the copper oxide Cu2O[J]. Nature, 2014, 514(7522): 343-347.

[40] RAEBIGER H, LANY S, ZUNGER A. Origins of the p-type nature and cation deficiency in Cu2 O and related materials[J]. Physical Review B - Condensed Matter and Materials Physics, 2007, 76(4): 1-5.

[41] 舒雲(yun) . Cu2O薄膜的電化學製備及其光電化學性能的研究[D]. 雲(yun) 南大學物理與(yu) 天文學院，2019.