橢偏儀在位表征電化學沉積的係統搭建（十二）- 光學常數的提取與COMSOL Multiphysics

正文

橢偏儀(yi) 在位表征電化學沉積的係統搭建（十二）- 光學常數的提取與(yu) COMSOL Multiphysics

2.3光學常數的提取

2.3.1建立光學模型

通過橢偏測試得到包含整個(ge) 池體(ti) 的參數ψ和Δ，這時要想提取CU₂O的光學常數及生長速率就需要進行建模擬合。首先把整個(ge) 池體(ti) 看成多層膜結構，光從(cong) 空氣中依次經過ITO、溶液、CU₂O以及Au襯底，zui後反射回到橢偏儀(yi) 的出射臂，zui終信息被接收。在物理層麵將池體(ti) 簡化為(wei) 四層膜的模型，即ITO/溶液/CU₂O/(Au/Si)，如圖2-3(a)所示。根據擬合需要可以對結構模型進行調整，如：ITO和溶液混合層/CU₂O/(Au/Si)的三層膜模型，如圖2-3(b)所示。

圖2-3光學模型示意圖(a)四層；(b)三層

數據分析中用的是全局誤差zui小化(GEM)數據分析法，數據分析程序如圖2-4所示。其中光學模型選用上述的層狀模型，擬合模型用Lorentz Oscillator+Drude模型和有效介質模型(EMA)。

圖2-4數據擬合分析程序

2.3.2 Film Wizard

Film Wizard擬合軟件是橢偏儀(yi) 專(zhuan) 用數據處理軟件，可以實現橢偏譜的擬合與(yu) 數據的提取。在建立好擬合模型後就可以使用該軟件進行擬合，擬合步驟如下：

1.數據轉換，即把橢偏儀(yi) 測試得到的數據格式(.dat)轉換為(wei) FilmWizard軟件可以識別的文件格式(.tar)；

2.打開Film Wizard軟件新建一個(ge) 項目，然後把建立好的多層模型寫(xie) 到新建的項目裏；

3.導入數據，即把已知的基底和其他層的數據導入模型，再把要擬合層的數據導入模型；

4.選擇擬合模型，Lorentz Oscillator+Drude模型或有效介質模型(EMA)；

5.擬合，選擇需要改變的擬合參數，如厚度、振子數等，然後通過調節要擬合的參數進行擬合直至擬合誤差達到要求。

6.當誤差達到zui小後，導出擬合得到的數據n、k、等。

2.4 COMSOL Multiphysics

COMSOL Multiphysics被廣泛国产成人在线观看免费网站到許多領域的科學研究和工程計算中，COMSOL Multiphysics在多物理場的全耦合方麵十分專(zhuan) 業(ye) ，可以高效的進行科學及工程領域的各種物理場景模擬，並在良好的計算性能與(yu) 出眾(zhong) 的雙向多場直接耦合模擬分析能力加持下實現高精度數值仿真。

我們(men) 国产成人在线观看免费网站了COMSOL軟件對電化學沉積中的電極形狀建模及電流密度分布的模擬。電化學模塊下主要一次和二次電流分布、三次電流分布、電池接口、腐蝕變形幾何、電鍍變形幾何接口。這裏主要用到了電化學模塊中的一次和二次電流分布接口中的一次電流分布，進行了一般穩態研究，其涉及到的方程有：

其中為(wei) 電解質的電位，為(wei) 電勢。在模擬過程中通過給定參數的初始值，即可進相應的擬合，得到電解液電場分布及電流密度分布等。

了解更多橢偏儀(yi) 詳情，請訪問上海昊量光電的官方網頁：

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